Author: WoREA Editorial Team

Montbonnot, France, June 13, 2013 – Altatech, a subsidiary of Soitec, announced today that it has installed and qualified an AltaCVD system at the Fraunhofer Research Institution for Modular Solid State Technology EMFT in Munich where it will be used to deposit poly-silicon films for CMOS and MEMS applications. This…

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